Wang Jianfeng
State Key Laboratory for Mechanical Behavior of Materials, Xi’an Jiaotong University, Xi’an 710049, ChinaMa Dayan
State Key Laboratory for Mechanical Behavior of Materials, Xi’an Jiaotong University, Xi’an 710049, ChinaSong Zhongxiao
State Key Laboratory for Mechanical Behavior of Materials, Xi’an Jiaotong University, Xi’an 710049, ChinaTang Wu
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, 610054, ChinaXu Kewei
State Key Laboratory for Mechanical Behavior of Materials, Xi’an Jiaotong University, Xi’an 710049, ChinaSupported by National Basic Research Program (973 program) (No. 2004CB619302), the National Natural Science Foundation of China (No. 50601020, 50601005) and Applied Materials (Xi’an) Foundation (No. XA-AM-200617)
[Wang Jianfeng, Ma Dayan, Song Zhongxiao, Tang Wu, Xu Kewei. Study on Microstructure and Properties of Zr-Si-N Films with Different Nitrogen Partial Pressures[J]. Rare Metal Materials and Engineering,2009,38(5):753~756.]
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