Preliminary Study on the Process for Producing High-Purity Ruthenium used for sputtering target
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Lanzhou University,Lanzhou University
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[zhangdeyu, liuweisheng. Preliminary Study on the Process for Producing High-Purity Ruthenium used for sputtering target[J]. Rare Metal Materials and Engineering,2016,45(5):1353~1356.] DOI：[doi]