Shen Yaming
State Key Laboratory of Solidification Processing, Northwestern Polytechnical University, Xi’an 710072, China
[Shen Yaming, Liu Zhengtang, Feng Liping, Liu Lu, Xu Bing. Preparation and Structure of HfSixOy Thin Film for High K Gate Dielectrics[J]. Rare Metal Materials and Engineering,2009,38(11):2039~2042.]
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