Abstract:The Cu/Ni multilayer films with modulation period thickness of 20-1200 nm were prepared on Ti811 titanium alloy surface by ion assisted magnetron sputtering deposition (IAD) technique. The structure, bonding strength, micro-hardness and ductility of the films were analyzed. The effects of the Cu/Ni multilayer films with different modulation periods on the fretting wear (FW) property and fretting fatigue (FF) resistance of the titanium alloy substrate at room temperature were investigated. The results indicate that the IAD technique can prepare Cu/Ni multilayer films with high density, small grain size, high bonding strength and excellent lubricating properties. Therefore, the Cu/Ni multilayer films could improve the resistance of fretting wear and fretting fatigue of the Ti811 alloy at room temperature. The FF resistance of the titanium alloy substrate is increased non-monotonously with increasing of the modulation period thickness of the Cu/Ni multilayer films. The Cu/Ni multilayer films with modulation period thickness of 200 nm have the highest FF resistance among the prepared Cu/Ni multilayer films for its comprehensive properties with high toughness, high strength and good lubricating action.