Abstract:The VO2(A) thin films with the property of the thermochromic phase transition were prepared by vacuum evaporation deoxidization technology with the V2O5 powders (purity≥99.99%) as starting materials. The morphology of the VO2(A) thin films were studied, which were affected by the annealing temperature, and its effects on the optical properties and electrical properties were also studied. The results show that the stratiform characteristics are weakened until disappear and the peak-like particles appear and become large when the annealing temperature increases from 500 oC to 540 oC; however, the peak particles diminish firstly and then become large when the annealing temperature continues to increase, but the sizes of the particles become similar, about 50 nm. With the alteration of the morphology, the parameters of the phase transition, such as the critical temperature, the order of magnitude and the hysteresis loop width will change correspondingly. As the critical temperature decreases, the transmission of the thin films will decrease correspondingly, but only the transmission in the middle infrared during the phase transition changes correspondingly to the order of magnitude.