Effect of the β Phase on Compressive Mechanical Property of CVD Tungsten

Abstract:

The high pure W (HPW) was deposited on the surface of purity Cu tubes through WF6 reduction by H2 adopting cold-wall atmospheric pressure CVD system. Results show that the compressive strength of the tungsten tube with the mixture phase deposited at 440 °C is much lower than that with only α phase deposited at 540 °C. The existence of β phase has a significant negative influence on the compressive property. After annealing treatment at 400 °C for 1 h, the β phase in the mixture will disappear, and its compressive strength reaches the level of the as-deposited α-W.

Key words:CVD tungsten; phase composition; compressive property; annealing treatment