Chu Futong
State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, Chinathe Scientific Research Fund Project of Jiangsu University of Technology (KYY12020); the National Natural Science Foundations of China (50361002); the Foundations of Natural Science of Guangxi (0448006)
[Chu Futong, Li Chuan, Wang Zhenzhong, Liu Xingzhao. Aluminum Nitride Thin Films on Molybdenum/Polyimide Heterostructure for Bulk Acoustic Resonators[J]. Rare Metal Materials and Engineering,2013,42(10):2023~2026.]
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