Abstract:Molybdenum (Mo) bilayer thin films were deposited on soda-lime glass using DC magnetron sputtering process. The structure, morphology, and electrical properties of Mo films have been studied by XRD, SEM, four-probe tester, etc. The results show that all bilayer films exhibit a body-centered cubic structure. The buffer layer with rough surface and many defects is initially made on the substrate, whose R-T relationship reflects the characteristics of the semiconductor. The resistivity of the thin film decreases with the top layer’s deposition time increasing. In addition, the R-T relationship of these films shows a metal feature. Compared with the monolayer film, bilayer films have lower resistivity and shorter sputtering time, so it greatly satisfies the requirement of CIGS solar cell back electrode.