Synthesis and Mechanical Properties of BCN Thin Films with TiN Interlayer

Abstract:

The BCN thin films with TiN interlayer were deposited on HSS and silicon (100) substrates by an arc enhanced reactive magnetron sputtering (AEMS). Microstructure of the thin films was characterized by meanings of XRD and FTIR. Adhersion to the sustrate of the thin films were characterized by scrach test. Hardness and tribological behavior of the thin films were explored by microhardness indenter and pin on disc tribometer. The present result shows that micro-hardness of the BCN thin films with TiN interlayer is 23GPa. Friction coefficient of the thin films against GCr15 steel balls is about 0.3, adhersion and tribological properties of the BCN thin films with TiN interlayer are obviously better than the BCN monolayer thin films.