Abstract:(Ti,Al)N thin films were prepared under different Ti/Al mosaic target(30%Al、50%Al、70%Al) by multi-arc ion plating technology which is in hollow cathode electron beam assisted deposition situation.The quality and properties were detected by XRD、CLSM and universal nano/micro material tester.The effects of Ti/Al target on phase composition 、surface roughness、friction coefficient、hardness and oxidation resistance were analyzed.The results show that coatings produced by 50%Al target give priority to Ti1-xAlxN phase composition and show minimum surface roughness(0.3188), friction coefficient(0.6074), maximum hardness (34.19GPa).The coating show no obvious change on phase composition when heating temperature lower than 800℃. At 900℃ substrate is oxidized due to the coating cracks. "hybrid interface" can form when hollow cathode electron beam assisted deposition,and “surface roughness” can also be reduced under this condition.