Study on the morphology and mechanical properties of TiN coatings prepared with different PVD methods

Abstract:

In this paper, TiN coatings are prepared on the GCr15 substrate by the cathode arc, magnetron sputtering and their composite methods. The coatings are characterized by Scanning electron microscope (SEM), XRD spectroscopy， microscratch test, friction and wear test, and the effects of different preparation methods on the structure and mechanical properties of the coatings are compared. The results show that the coating prepared by composite arc and magnetron technique possesses better comprehensive properties such as a smooth surface, high cohesion and hardness ,so wear rate is lower.

Key words:PVD deposition, TiN coating, wear and friction, composite deposition