Abstract:0.7BiFeO3-0.3PbTiO3 thin films with 0%, 1%, 5%, 10 % Mn doping (BFMPT7030/x, x=0, 0.01, 0.05, 0.1) were prepared on LaNiO3/SiO2/Si substrates by a sol-gel process. XRD results indicate that the films are completely crystallized and present highly (100) preferred orientation. Crystalline structure analyses of the thin films reveal that BFMPT7030/0.05 thin film has the smallest grain size (258 nm) and the smallest cell volume (61.25×10-3 nm3). SEM results show that the crystalline grains are fully grown up and the grain size is between 150~300 nm. The BFMPT7030 thin film with 5% Mn doping demonstrates good ferroelectric properties and a saturated hysteresis loop is observed. The leakage current tests show that with increasing of Mn content, the increasing tendency of the leakage current becomes slow as electric field increases.