Microstructure and Surface properties of TiCN Films Deposited Using Cathodic Arc Deposition Enhanced by Additional Electric Field

Abstract:

TiCN coatings have been deposited on 304 stainless steel by newly developed cathodic arc deposition enhanced by additional electric field. The effect of the current of additional electrode on cathode arc discharge, film microstructure, cross-sectional morphology, wear resistance and adhesion between film and substrate have been investigated. The experimental results show the plasma density has been substantially increased after introduction of additional electrode in the chamber and the substrate current is improved by nearly 100%. Only a properly higher current of additional electrode may effectively decrease the crystal size and make the film structure much denser, consequently the critical load of deposited films has been enhanced. The sample deposited at a 30A-current of additional electrode possesses the highest adhesion force between film and substrate (HF1), best wear-resistance featured by narrowest wear track. The friction coefficient may decrease by 33% compared to the sample fabricated without the assistance of additional electrode. In summary cathodic arc deposition enhanced by additional electric field is an effective tool to fabricate TiCN films.

Key words:Electric field enhancement; cathodic arc deposition; TiCN; microstructure; surface properties