Effect of Deposition Temperature on Properties of Rhenium Coatings Prepared by Chemical Vapor Deposition

Abstract:

The rhenium coatings were prepared by cold-wall chemical vapor deposition approach on the molybdenum matrix using ReCl₅ heat decomposition reaction. The effect of deposition temperature to phase composition, deposition rule, surface morphology, density and hardness were studied. The results show that all of as-parpered coatings have a strong preferential growth orientation of (002). With the increasement of deposition temperature, the deposition rate and efficiency rapidly increase. Meanwhile, the topography of CVD Re coatings change from complicated polyhedron to hexagonal pyramid. All the coatings are quite dense and the relative density can reach up to 99.9%. Vickers hardness increase with the deposition temperature and it can be up to 610.