Abstract:TiSiCN, TiSiCON, TiCrSiCN, TiCrSiCON, CrSiCN and CrSiCON coatings have been deposited on WC-Co substrates and Si wafers using plasma enhanced magnetron sputtering (PEMS) technique. The microstructure, composition and mechanical properties of the non-oxygen coatings and oxygen-containing coatings were studied by using XRD, SEM, EDS and load-depth-sensing indentation. The tribological behavior of the coatings against Al2O3 balls was conducted by pin-on-disc tests. The results showed that TiSiCON, TiCrSiCON and CrSiCON coatings exhibited the face center cubic (fcc) TiN-type (or CrN-type) structure but the existence of oxygen will induce loose structure and more defects for TiSiCON, TiCrSiCON and CrSiCON coatings compared with TiSiCN，TiCrSiCN and CrSiCN, respectively. The addition of oxygen element would lead to the decrease of the hardness (H) and elasticity of Ti(Cr)SiCN coatings. TiCrSiCON and CrSiCON coatings with oxygen element have lower friction coefficients and wear rate compared with TiCrSiCN and CrSiCN coatings without oxygen, respectively. While the TiSiCON with higher friction coefficient and wear rate shows poor abrasive wear resistance than TiSiCN.