Influence of substrate temperature on electrical and optical properties of sputtered binary SnO2-Al2O3 thin films on slide glasses

Home > Archive>Volume 46, Issue 11, 2017 >3217-3221

Influence of substrate temperature on electrical and optical properties of sputtered binary SnO2-Al2O3 thin films on slide glasses
DOI:
                        
Author:
                        
Affiliation:Institute of Applied Physics,The Key Laboratory for Surface Engineering and Remanufacturing of Shaanxi,Xi’an University,Xi’an,School of Electronic Engineering,Xi’an University of Posts and Telecommunications,Xi’an,Institute of Applied Physics,The Key Laboratory for Surface Engineering and Remanufacturing of Shaanxi,Xi’an University,Xi’an,Institute of Applied Physics,The Key Laboratory for Surface Engineering and Remanufacturing of Shaanxi,Xi’an University,Xi’an,Institute of Applied Physics,The Key Laboratory for Surface Engineering and Remanufacturing of Shaanxi,Xi’an University,Xi’an,Institute of Applied Physics,The Key Laboratory for Surface Engineering and Remanufacturing of Shaanxi,Xi’an University,Xi’an,Institute of Applied Physics,The Key Laboratory for Surface Engineering and Remanufacturing of Shaanxi,Xi’an University,Xi’an,Institute of Applied Physics,The Key Laboratory for Surface Engineering and Remanufacturing of Shaanxi,Xi’an University,Xi’an
Clc Number:
Fund Project:

Article

Figures

Metrics

Reference

Cited by

Materials

Comments

Abstract:

SnO₂-Al₂O₃ (SAO) binary thin films were prepared on slide glasses substrates by RF magnetron sputtering. The influence of the substrate temperature on the micrographs, crystal structures, electrical and optical properties were analyzed by using the scanning electron microscopy (SEM) images, X-ray diffraction (XRD) patterns, four-probe measuring, UV-IR and photoluminescence (PL) spectra. By increasing substrate temperature, the grain sizes of SAO binary films were enhanced, uniform patterns and large size grains indicate a better surface morphology and crystallinity of SAO films, which were verified by SEM and XRD investigations. All the films have a high average transmittivity of ~80%-90% in visible light region 400-800nm. The calculated band gap was in a range of ~4.11-4.14eV, and the measured sheet resistances of SAO films were in a range of ~7.0 to ~9.4 . By proper choosing sputtering temperature, the band gap can be widened, and the sheet resistances can be reduced. The PL emissions from the films in UV and red bands were also observed. These polycrystalline SAO films can be used in the application of transparent conductive oxide (TCO) films, solar cell windows, sensors, as well as lighter emitters.

Reference

Cited by

Get Citation

[Li Yuanyuan, Luo wenfeng, LI Shuli, Chen Zhen, Zhao Xiaoxia, He Junfang, Zhang Penfei, Xu Kewei. Influence of substrate temperature on electrical and optical properties of sputtered binary SnO₂-Al₂O₃ thin films on slide glasses[J]. Rare Metal Materials and Engineering,2017,46(11):3217~3221.]
DOI：[doi]

Copy

Article Metrics

Abstract:
PDF:
HTML:
Cited by:

History

Received:December 07,2016
Revised:December 07,2016
Adopted:March 01,2017
Online: December 13,2017
Published:

Home

Introduction

Editorial Board

Submission Guideline

Contact Us

中文

Get Citation

Article Metrics

History