Abstract:With the help of self-designed magnetic field generator,beryllium bronze as the substrate, Fe-Ga-Al-Y MF samples were prepared under different static magnetic field environments by ion beam sputter deposition, its composition is Fe74.34-79.33Ga11.45-13.73Al5.33-6.95Y3.27-4.36 .The surface morphology of Fe-Ga-Al-Y MF was observed by atomic force microscopy (AFM) and scanning electron microscopy (SEM). Deflection of cantilever and hysteresis loop of films were measured by laser micro-displacement sensor and alternating gradient magnetometer, respectively. The surface morphology of Fe-Ga-Al-Y MF and the effect of the direction and size of the static magnetic field applied during deposition on magnetic properties of the films were studied．The results showed that the thin film samples prepared by IBSD method have smooth surface, no obvious defects, and the structure of the thin film is uniform and compact.The easy magnetization axis direction of films can be regulated by static magnetic field applied during film formation. The easy magnetization axis direction of Fe-Ga-Al-Y MF was the same to the direction of the static magnetic field applied during film formation. When the direction of static magnetic field applied during film formation was parallel to the minor axis direction of the substrate, it can significantly improve the saturation magnetostrictive properties of the Fe-Ga-Al-Y MF. With the increase of magnetic field, the saturation magnetostriction coefficient of film has been continuously improved and the saturation magnetization , coercive force of the films within the film plane (along the x-axis direction, y-axis direction) gradually increased .