Structural performance characterization of Al0.7Sb2Te3 ternary target

Abstract:

Al_0.7Sb₂Te₃ternary target was prepared by vacuum synthesis and sintering-HIP method by mixed powder with atom ratios of 0.7:2:3 as raw material. Target properties was characterized by means of XRD, FESEM, EDS and XPS, and the state of Al in the ternary target was researched primarily by XPS. The results show that with Aluminum doped, main phase Sb₂Te₃’s lattice constant decreases, and the Aluminum dispersoids can coexist together with Al_0.1Sb₂Te₃ matrix, which mean the existence of effect on target organization structure with Aluminum doped; with etching depth increases from 0 to 405.9nm, the main content of Aluminum’s valence is gradually transferred from the compound state of Al₂O₃ to simple substance state, and the area depth of Aluminum’s form dominated by Al₂O₃ is about 90nm; with etched by 405.9nm, the Aluminum’s valence from non-oxide and Antimony’s valence from AlSb can certify the Aluminum of Al_0.1Sb₂Te₃ matrix influences target organization structure by forming effectively AlSb.