Abstract:The tribological properties of (AlCrNbTiVCe)N coating at 500 ℃ fabricated by co-sputtering of Ce and AlCrNbTiV alloy were investigated. Scanning electron microscopy (SEM), X-ray diffraction(XRD) and X-ray photoelectron spectroscopy(XPS) were used to characterize the microstructure, composition and crystal structure of the coatings. The mechanical properties and tribologiccal properties of the coatings were tested by nano indentation, tribometer and white light interfering profilometer.The results show that the (AlCrNbTiVCe)N coatings were perfectly prepared by magnetron sputtering. The addition of Ce can improve the structure,and makes grains refined. Meanwhile,the addition of Ce markedly increases the hardness of coatings, which makes the coatings have excellently resistance to plastic deformation and elastic deformation,leading to considerably enhance the friction and wear properties of the coating.The friction coefficient and wear rate of (AlCrNbTiVCe)N coating are significantly lower than that of free Ce (AlCrNbTiV)N coating at room temperature, and the wear mechanism is slight abrasive wear and adhesive wear; at 500 ℃, the friction coefficient of (AlCrNbTiVCe)N coating is lower than that at room temperature, and wear mechanism is mainly oxidation wear. It is indicated that the introduction of Ce contributes to the formation of CeO2 on the coating surface, and thus improves the tribological properties of (AlCrNbTiVCe)N coatings.