Abstract:Vacuum arc deposition has become one of the indispensable techniques in the coating field, and it is widely studied and applied in the metal, decoration, hard wear resistance, and other fields. The application research of coating techniques promotes the investigation on arc source technique, which mainly focuses on the fields of long life, high reliability, and macroparticle suppression. The realization of macroparticle suppression is based on the satisfaction of long life and high reliability. With reducing the residence time of arc spots on the target surface, the macroparticle suppression can be obtained. This result can be achieved by ingenious design of permanent magnet or electromagnetism, thereby obtaining a target surface with strong transverse magnetic component. However, when the magnetic field intensity increases, the internal characteristics of target and the proportional relationship between the longitudinal magnetic field and the transverse magnetic field should be comprehensively considered. Another macroparticle suppression method is the pulsed arc technique. The pulsed arc source frequently strikes the arc, which is very different from the direct current arc source in structure design. The instantaneous current can reach thousands, even more than ten thousands amperes, therefore obtaining a high deposition rate. At the same time, the anode design leads to the directional jet of plasma, which can filter out most large particles.