Abstract:In this work, 2 ?m-thick CrN/TiN superlattice coatings with modulated period of 6.3 nm were deposited by the combined deep oscillation magnetron sputtering (DOMS) and pulsed dc magnetron sputtering (PDCMS), and single PDCMS, respectively. Microstructure of coatings was characterized using XRD, SEM and TEM. Mechanical and tribological properties of coatings were analysized using nanoindenter, scratch test and ball-on-disc tribometer. Anode polarization tests in 3.5 wt.% NaCl aqueous solution were used to evaluate corrosion resistance of coatings. As compared with the coatings deposited by single PDCMS, the coatings deposited by combined DOMS+PDCMS showed higher mechanical properties, endurable wear resistance and antifriction properties and corrosion resistance due to the improved architecture.