Effect of Substrate Temperature and Nitrogen Flow Rate on (Ti, Al) N Coating Properties
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[Wang Yongkang, Cheng Xiangyu, Wang Weiming, Gu Xiaohong, Li Bingsheng. Effect of Substrate Temperature and Nitrogen Flow Rate on (Ti, Al) N Coating Properties[J]. Rare Metal Materials and Engineering,1994,(3):55~58.] DOI:[doi]