Effects of Incident Angle on Microstructure of Ni Thin Film Deposited by PVD
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[Shan Yingchun, Xu Jiujun, He Xiaodong, He Fei, Li Mingwei. Effects of Incident Angle on Microstructure of Ni Thin Film Deposited by PVD[J]. Rare Metal Materials and Engineering,2007,36(4):583~586.] DOI：[doi]