Relationship between Resistivity of Metallic Film and Its Surface Roughness,Residual Stress
DOI:
Author:
Affiliation:
Clc Number:
TB43
Fund Project:
Article
|
Figures
|
Metrics
|
Reference
|
Related
|
Cited by
|
Materials
|
Comments
Abstract:
Reference
Related
Cited by
Get Citation
[Jian Lu, Tang Wu, Deng Longjiang, Xu Kewei, Jian Lu. Relationship between Resistivity of Metallic Film and Its Surface Roughness, Residual Stress[J]. Rare Metal Materials and Engineering,2008,37(4):617~620.] DOI：[doi]