Abstract:This work was to introduce the voltage characteristics between the target and the vacuum chamber into positive-Ohm and anti-ohm and to study the influence rule on the uniformity of the coating and the membrane-binding intensity caused by the different target current controlled by impulse model. It was found that the target voltage increased with increasing target current density linearly when the target current density(Id) increased from 0.083A/cm2 to 0.175A/cm2. Meanwhile, the difference of coating thickness increased from 7.984μm to 14.011μm. However, the targer volttage decreased linearly with increasing target current density when the target current density increases from 0.175A/cm2 to 0.25A/cm2, and the difference of coating thickness decreased from 14.011μm to 10.077μm. The decreasing rate of film thickness changed from 97.38% (Id=0.083A/cm2) to 89.491% (Id=0.25 A/cm2). In addition, the film adhesion intensity rapidly increased with increasing target current density in the anti-ohm section. The above results show that the anti-ohm environment is conducive to improving the uniformity of the coating and the film adhesion intensity.