Preparation and analysis of molybdenum coating on the surface of silicon carbide

Abstract:

The molybdenum coating was successfully deposited on the surface of silicon carbide by magnetron sputtering method, its surface morphology and chemical composition were analyzed. In order to ameliorate the surface morphology and the state of molybdenum coating, different kinds of crystallized heat-treatment were carried out. The evolution of the surface morphology and chemical composition of the molybdenum coating were investigated in detail and the results are as follows: The molybdenum coating can be successfully deposited on the surface of silicon carbide by magnetron sputtering method, with the sputter time postponed the roughness and the thickness of the coating was enhanced, and furthermore the molybdenum on the surface was in amorphous state. During the crystallized heat-treatment process, the morphology evolution of the molybdenum coating was as follows: the primary densification phase, the compactly crystallization of molybdenum atoms, the dispersive accumulation of molybdenum coating, the reaction between molybdenum and silicon carbide. The state evolution of molybdenum atoms was as follows: amorphous molybdenum, crystalline molybdenum, molybdenum compound (Mo₂C and MoSi₂). And the best heat treated temperature range is about 800℃-900℃. It is believed that the uniform and compactly Mo coating will broaden the application filed of SiC particles as the reinforcement in metal matrix composites especially have advantaged in control the interfacial reaction and improve interface bonding force in metal matrix composite.