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Structural performance characterization of Al0.7Sb2Te3 ternary target
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Powder Metallurgy and Special Materials Research Department,General Research Institute for Non-Ferrous Metals

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    Abstract:

    Al0.7Sb2Te3ternary target was prepared by vacuum synthesis and sintering-HIP method by mixed powder with atom ratios of 0.7:2:3 as raw material. Target properties was characterized by means of XRD, FESEM, EDS and XPS, and the state of Al in the ternary target was researched primarily by XPS. The results show that with Aluminum doped, main phase Sb2Te3’s lattice constant decreases, and the Aluminum dispersoids can coexist together with Al0.1Sb2Te3 matrix, which mean the existence of effect on target organization structure with Aluminum doped; with etching depth increases from 0 to 405.9nm, the main content of Aluminum’s valence is gradually transferred from the compound state of Al2O3 to simple substance state, and the area depth of Aluminum’s form dominated by Al2O3 is about 90nm; with etched by 405.9nm, the Aluminum’s valence from non-oxide and Antimony’s valence from AlSb can certify the Aluminum of Al0.1Sb2Te3 matrix influences target organization structure by forming effectively AlSb.

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[Sun Chuanxi, Zhou Zenglin, Xie Yuanfeng, Xia Yang. Structural performance characterization of Al0.7Sb2Te3 ternary target[J]. Rare Metal Materials and Engineering,2019,48(7):2203~2207.]
DOI:10.12442/j. issn.1002-185X.20180016

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History
  • Received:January 04,2018
  • Revised:March 09,2018
  • Adopted:March 12,2018
  • Online: August 01,2019
  • Published: