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Structure and Tribological Properties of MoS2 Films Deposited by Unipolar Pulse Magnetron Sputtering
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South western Institute of Physics

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The project was supported by Sichuan Municipal Technical Innovation Fund for Youth, China (2016TD0015)

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    Abstract:

    MoS2 films wre prepared on A286 substrate by unipolar pulse magnetron sputtering. The morphology,microstructure and composition of the films were characterized by using scanning electron microscopy, X-ray diffractometer. The mechanical properties and tribological behavior in air of the films were investigated by using nano-indentation tester and ball-on-disc tribotester. This paper discusses effects of pulsed bias on microstructure, mechanical properties and tribological properties of MoS2 Films. The results show that the preferential oriention of coatings changes from (002) to (100) in advance with the pulse bias voltage increasing from 300 V to 600 V. When the pulse bias voltage increasing to 800V, the preferential oriention renews to (002), and the film was of smooth and compact structure.With the pulse bias voltage increasing, the hardness and elastic modulus will decrease firstly and increase afterward. The friction coefficient fluctuated in the range of 0.065~0.076 and show the tendency of increasing firstly and decreasing afterward. When the bias voltage is 800 V, the property and performance of friction is the best. The wearing rate is only 13.5% of the substrate, It shows the lower friction coeffient and the good wearing resistance.

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[DAN Min, LUO Rong-rong, ZHOU Yi, LI Jian, JIN Fan-ya. Structure and Tribological Properties of MoS2 Films Deposited by Unipolar Pulse Magnetron Sputtering[J]. Rare Metal Materials and Engineering,2019,48(8):2716~2722.]
DOI:10.12442/j. issn.1002-185X.20180266

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History
  • Received:March 21,2018
  • Revised:April 03,2018
  • Adopted:May 18,2018
  • Online: September 05,2019
  • Published: