金属阴极电弧烧损机理及耐烧蚀阴极研究进展

Research Progress on Cathodic Arc Ablation Mechanisms and Ablation-Resistant Cathodes

摘要:

电弧等离子体设备的稳定工作时长受限于金属阴极的快速烧损失效。研制长寿命、服役稳定的阴极对提升现有设备运行能力至关重要，明确阴极的电弧放电过程的烧蚀行为和烧损机理，是研制高性能阴极的基础。本文在分析金属阴极复杂极端燃弧服役过程的基础上，介绍了蒸发喷溅烧蚀机理、氧化物剥离烧蚀机理和阴极斑点致非均匀烧蚀机理。进一步地，综述几种改性阴极耐电弧烧蚀性能的研究进展，包括阴极组织细化、外加低逸出功相和阴极功能梯度化。围绕阴极斑点放电及烧蚀坑结构演化的原位观测、阴极多场耦合烧蚀损伤模型构建，和阴极设计-试制-考核的全流程研发制度建立等方面，展望长寿命金属阴极研制未来的发展方向。

Abstract:

Cathodic arc ablation restricts the stable operating time of arc plasma devices. Developing cathodes with long lifespan and service stability is essential for improving the operating capability of current equipment. Understanding cathodic arc ablation behavior and failure mechanisms is key to developing high-performance cathodes. This article firstly analyses the intricate arc ablation process of metallic cathodes and introduces failure mechanisms of sputtering, oxidation, and inhomogeneous ablation resulting from cathode spots. Furthermore, it reviews the recent advancements in improving cathode ablation resistance, including grain refinement, low work function addition, and gradient functionalization. In the final section, the future development of metallic cathodes is prospectively discussed based on in-situ observation of cathode spots, the construction of multi-field cathodic arc ablation model, and the establishment of a comprehensive cathode developing regime encompassing design, manufacturing, and testing processes.