乙炔气体对等离子体增强化学气相沉积DLC膜力学性能的影响

Effects of Acetylene Gas on Mechanical Properties of DLC Film Prepared by Plasma-Enhanced Chemical Vapor Deposition

摘要:

为了提高2024铝合金的机械性能，采用等离子体增强化学气相沉积技术在2024铝合金表面沉积类金刚石碳（DLC）薄膜。通过场发射扫描电子显微镜、纳米压痕测试仪和摩擦磨损试验仪研究了乙炔气体对DLC薄膜的微观结构、硬度、耐磨性和粘附性的影响。结果表明，DLC薄膜的厚度随着乙炔比例的增加而逐渐增厚，且DLC薄膜与基体间存在明显过渡层。当氩气与乙炔气体的比例为1:3时，由于薄膜内sp³和sp²键含量的变化，DLC薄膜的硬度显著提高，同时，DLC薄膜的摩擦系数下降。

Abstract:

To improve the mechanical properties of 2024 aluminum alloy, a kind of diamond-like carbon (DLC) film was deposited on the surface of 2024 aluminum alloy by plasma-enhanced chemical vapor deposition technique. The effects of acetylene gas on the microstructure, hardness, wear resistance, and adhesion of DLC film were investigated by field emission scanning electron microscope, nano-indentation tester, and friction-wear tester. The results indicate that the thickness of the DLC film increases gradually with increasing the proportion of acetylene. There is an obvious transition layer between the DLC film and matrix. When the ratio of argon to acetylene is 1:3, the hardness of DLC film is enhanced significantly because of the content changes of sp³ and sp² bonds within the film. At the same time, the friction coefficient of DLC film is reduced.