Process Optimization for Preparing Uniform and Dense Tungsten Coatings on Throat Liners by CVD 备注（英文论文，RMME-2025-0058）

摘要:

钨优异独特的物理化学性能，使其成为适用于火箭领域的理想材料。化学气相沉积（CVD）技术能够在复杂构件（如火箭发动机喉衬）表面制备均匀的钨涂层，应用前景广阔。本研究对已建立的钨低压化学气相沉积模型进行改进，使其可在常压条件下于火箭发动机喉衬表面沉积高性能涂层。研究分析了三种不同反应器结构——直管进气反应室、加装布气装置反应室、加装布气装置与引流板反应室，以及结构对反应室内流动特性、温度场、组分浓度及沉积反应的影响。数值模拟与实验结果表明，采用布气装置与引流板相结合的反应室可通过增强气体径向扩散，消除反应室喉衬处的涡流，从而显著提升流场均匀性。该优化设计不仅提高了喉衬构件表面沉积速率的均匀性，还小幅提升了六氟化钨的利用效率。本研究为高均匀性钨涂层化学气相沉积系统的设计提供了理论基础，同时为其工程化应用提供了可行方案。

Abstract:

Tungsten's distinctive physical and chemical properties make it a highly suitable material for rocket applications. Chemical vapor deposition (CVD) is a promising technique for applying uniform tungsten coatings to complex-shaped components (e.g., rocket engine throat liner). This study adapts a previously established low-pressure CVD model for tungsten, enabling its application under atmospheric pressure conditions to deposit high-performance coatings on rocket engine throat liners. We investigate the influence of three distinct reactor configurations—a straight-tube inlet, an integrated gas distribution device, and a combination of a distribution device with a flow guide baffle—on the reactor's flow dynamics, thermal field, species concentration, and deposition kinetics. Numerical and experimental results demonstrate that the configuration incorporating both a distribution device and a baffle eliminates vortices within the liner region by promoting radial gas diffusion, thereby significantly improving flow field uniformity. This optimized design not only improves the uniformity of the deposition rate on the throat insert, but also slightly enhances the utilization efficiency of tungsten hexafluoride. This work provides a theoretical foundation for designing CVD systems for highly uniform tungsten coatings and offers a practical solution for their engineering application.