Abstract:The electrical conductivity and corrosion resistance of the amorphous carbon-based coating were improved by doping an appropriate amount of Ti nanocrystals. The magnetron sputtering system and the self-developed high-frequency oscillating pulsed electric field were used to prepare several groups of carbon-based coatings with different Ti doping amounts. The effect of Ti nanocrystal addition on the electrical conductivity and corrosion resistance of amorphous carbon-based coatings was studied. The results show that with increasing the Ti target current from 0.35 A to 0.7 A, the Ti doping amount in the coating is increased with the Ti content reaching 8.20at%, and the carbon-based coating changes from amorphous structure to Ti nanocrystalline/amorphous carbon composite structure. In addition, appropriate doping of Ti is beneficial to improve the density, electrical conductivity, hydrophobicity and corrosion resistance of the coating. When the Ti target current is set as 0.7 A, the sheet resistance of the coating reaches its minimum value of 4.5 Ω/□. When the Ti target current is increased to 0.9 A, the water contact angle of the coating achieves its maximum value of 97.75°, while the corrosion current density decreases to its minimum value of 1.408×10-5 A·cm-2.