Erosion Resistance and Damage Evolution of Ti-doped Ta2O5 High-Transmittance Coatings

Abstract:

To verify the wear resistance and erosion resistance of Ti-doped Ta₂O₅ coating (TTO), a series of TTOs were prepared by magnetron sputtering technology by controlling the power of the Ti target. The change of growth structure, microstructure, and tribological properties of TTOs with Ti target power was studied. After the erosion test, the variation of erosion damage behavior of TTOs with mechanical properties under different erosion conditions was further studied. The results show that the TTOs eliminate the roughness, voids, and defects in the material due to the mobility of the adsorbed atoms during the growth process, and a flat and dense smooth surface is obtained. Tribological tests show that the TTOs are mainly characterized by plastic deformation and microcrack wear mechanism. Higher Ti target power can improve the wear resistance of TTOs. Erosion test results reveal that the impact crater, furrow, micro-cutting, brittle spalling, and crack formation are the main wear mechanisms of the TTOs samples under erosion conditions.