Research Progress on Cathodic Arc Ablation Mechanisms and Ablation-Resistant Cathodes

Abstract:

Cathodic arc ablation restricts the stable operating time of arc plasma devices. Developing cathodes with long lifespan and service stability is essential for improving the operating capability of current equipment. Understanding cathodic arc ablation behavior and failure mechanisms is key to developing high-performance cathodes. This article firstly analyses the intricate arc ablation process of metallic cathodes and introduces failure mechanisms of sputtering, oxidation, and inhomogeneous ablation resulting from cathode spots. Furthermore, it reviews the recent advancements in improving cathode ablation resistance, including grain refinement, low work function addition, and gradient functionalization. In the final section, the future development of metallic cathodes is prospectively discussed based on in-situ observation of cathode spots, the construction of multi-field cathodic arc ablation model, and the establishment of a comprehensive cathode developing regime encompassing design, manufacturing, and testing processes.