Abstract:To fabricate high-purity tantalum target billets with uniform grain size, preferential orientation, and homogeneous hardness distribution, a series of high-purity tantalum target billets were prepared by electron beam melting and multi-pass rolling technique. The effects of rolling modes (cold rolling/hot rolling) and multi-pass rolling reduction on the microstructure, and mechanical properties of tantalum target billets were investigated. The results indicate that compared with that prepared by hot rolling, the sample prepared by cold rolling exhibits smaller and more uniform grain size. Under cold rolling condition, the multi-pass rolling reduction decreases from 20% to 2%, and the grain size and standard deviation of the tantalum target billets change significantly, varying from 46.01 μm to 58.92 μm. Meanwhile, the proportion of (100) and (111) crystal planes gradually increase, while the proportion of (110) crystal plane rapidly decreases. When the multi-pass rolling reduction is 2%, the growth of the (110) crystal plane in the tantalum target blank sample is certainly inhibited, a high proportion of (100)-(111) mixed random texture is obtained, and the Vickers hardness of the tantalum target increases to 147.68 HV. These research findings provide an important reference for the development of high-quality tantalum target billets.